Berlin 2018 – wissenschaftliches Programm

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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 10: Spectroscopy and Microscopy I with X-rays and Ions

KFM 10.4: Vortrag

Dienstag, 13. März 2018, 10:40–11:00, EMH 225

Imaging with Nanometer Resolution from 8 to 100 keV using Multilayer Zone Plates (MZP) — •Jakob Soltau, Tim Salditt, and Markus Osterhoff — Institut für Röntgenphysik, Georg-August-Universität Göttingen, Göttingen, Germany

The brilliance of modern synchrotrons cleared the path towards generating highly focussed x-ray beams. Latest developments in the fabrication of multilayer zone plates (MZP) using the pulsed laser deposition process have enabled to decrease the resolution defining smallest zone widths down to 5 nm [1]. At the same time the optical thickness, important for efficiency, was enlarged up to 30 μm. In recent experiments at Petra III endstation P10, the MZPs were used in a scanning microscopy setup at 13.8 keV. It was possible to resolve a Siemens star test pattern with smallest feature sizes of 50 nm. A first proof-of-concept experiment at the ESRF endstation ID31, extended the limit of imaging with MZPs to photon energies of 100 keV [2].

[1] C. Eberl et al. Fabrication of laser deposited high... In: Applied surface science 307 (2014)

[2] M. Osterhoff, et al. , Ultra-high-aspect multilayer zone plates for even higher x-ray energies, Proc. SPIE (2017)