Berlin 2018 – scientific programme
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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 10: Spectroscopy and Microscopy I with X-rays and Ions
KFM 10.8: Talk
Tuesday, March 13, 2018, 12:20–12:40, EMH 225
Scanning Transmission X-ray Microscopy with Fluorescence Detection — •Andreas Haidl1, Konstantin Andrianov1, Thomas Nisius1, Lars Lühl2, Aurelie Dehlinger2, Hanna Dierks2, Birgit Kanngießer2, and Thomas Wilhein1 — 1Institute for X-Optics, University of Applied Sciences Koblenz, RheinAhrCampus Remagen, Germany — 2Institute for Optics and Atomic Physics, Technical University Berlin, Germany
X-ray microscopy can be used in many research fields for imaging applications with resolutions notable below 100nm, continuously pushing the limits to near diffraction limited resolutions.
AnImaX (Analytical Imaging with X-rays) is a flexible endstation for combining scanning and full field microscopy using synchrotron radiation in the soft X-ray spectral range. The AnImaX platform consists out of up to three separate vacuum chambers and custom designed high resolution piezo driven stages. The AnImaX endstation has been successfully put to work at the beamline P04 at PETRA III.
The use of a spatial resolved detector in scanning mode allows the simultaneous acquisition of different imaging modes by adjusting the detector response function. The CCD based multimodal detector system allows beside absorption contrast the acquisition of phase contrast and dark field images. The obtained diffraction patterns can also be used for ptychography. In the scanning mode the SDD detector with its outstanding solid angle of detection also gathers a fluorescence spectrum for each pixel. Thereby a detailed spatial elemental and chemical analysis of the specimen is performed.