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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 13: Diamond I

KFM 13.2: Vortrag

Mittwoch, 14. März 2018, 10:00–10:20, E 020

Quantum Coins and Nano Sensors: Development of Unforgeable Diamond Money — •Alexander Schmidt, Johann Peter Reithmaier, and Cyril Popov — Institute of Nanostructure Technologies and Analytics, Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

The integration of NV centers within diamond nanostructures such as nanopillars and AFM tips can be used for the development of quantum coins implementation and quantum sensing of magnetic fields at a nanoscale. Here we report on our two main fabrication procedures for structuring of nanocrystalline diamond (NCD) films: First, for highly dense arrays of nanopillars and second for AFM tips. The fabrication process of nanopillars consisted of their definition by electron beam lithography (EBL) applying a hard mask and subsequent inductively coupled plasma reactive ion etching (ICP RIE) with oxygen. The lateral distances of the pillar arrays with 200, 100 and 50 nm diameter were decreased up to the highest package density achieveable. NCD AFM tips were fabricated by means of the moulding technique, using conventional photolithography and anisotropic wet etching of the silicon substrate.