Berlin 2018 – wissenschaftliches Programm
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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 7: Microstructure of thin films / TEM-based Nanoanalysis
KFM 7.1: Vortrag
Montag, 12. März 2018, 15:00–15:20, E 124
Scanning Transmission Helium Ion Microscopy on 1nm Thick Carbon Nanomembranes — •Daniel Emmrich1, Annalena Wolff2, André Beyer1, and Armin Gölzhäuser1 — 1Bielefeld University, Germany — 2Queensland University of Technology, Australia
The Helium Ion Microscope (HIM) offers a lateral imaging resolution of 0.3 nm and is known for its excellent sub 10 nm milling capabilities [1]. While imaging with secondary electrons (SE) is well established for this microscope, the ion transmission signal attracts growing attention. Imaging in bright or dark field transmission offers additional information on membranes [2], core shell nanoparticles [3]and can be used for the inspection of milled features, e.g., membrane pores. Monolayer thin membranes have not been studied so far. Here we show a dark field transmission imaging study on 1nm thick Carbon Nanomembrane (CNM) by using a SE conversion plate. CNM are made of self-assembled monolayers that are cross-linked by low energy electrons resulting in a 1 nm thick carbon membrane with tunable conductivity [4]. Imaging the same sample site with different acceptance angles, we are able to compare the measured contrasts with simulated scattering angles from SRIM [5] and discuss the applicability of those simulations on ultimate thin membranes. [1] G. Hlawacek, A. Gölzhäuser (Eds.), Springer Int., Switzerland 2016. [2] A. R. Hall, Microsc Microanal 2013, 19, 740. [3] T. J. Woehl et al., Microsc Anal, 2016, 22, 544. [4] A. Turchanin, A. Gölzhäuser, Adv. Mater 2016, 28, 6075. [5] J. F. Ziegler et al., Nucl. Instr. Meth. Phys. Res. 2010, 268, 1818.