Berlin 2018 – wissenschaftliches Programm

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MA: Fachverband Magnetismus

MA 21: Poster I

MA 21.96: Poster

Dienstag, 13. März 2018, 09:30–13:00, Poster A

Multilayer Fresnel zone plates — •Umut T. Sanli, Margarita Baluktsian, Markus Weigand, Iuliia Bykova, Gisela Schütz, and Kahraman Keskinbora — MPI for Intelligent Systems, Stuttgart, Germany

Multilayer type (ML) Fresnel zone plates (FZP) were first suggested 35 years ago and drew incredible attention in X-ray community as they can achieve very high aspect ratios which makes it theoretically possible to focus a very broad range of X-rays including very hard X-rays down to around 20 nm. Because of the needed high precision in zone positioning, circularity and the needed low zone roughness, ML-FZPs have suffered from lower than optimum efficiencies and lens aberrations. With our new insight into the fabrication method, which utilizes atomic layer deposition (ALD) technique to deposit the multilayer zones of the ML-FZP, we were able to fabricate high quality ML-FZPs and achieved astigmatism-free direct imaging with high diffraction efficiency for the first time in ML-FZP history [1], and resolved 15.5 nm structures, the world record direct imaging resolution achieved by an ML-FZP. With our ALD fabricated Multilayer Fresnel zone plates we aim for sub 10 nm imaging resolution.