Berlin 2018 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 47: Poster Session II

MM 47.29: Poster

Mittwoch, 14. März 2018, 18:30–19:45, Poster C

Template-Assisted Fabrications of Nanostructure-Array-Based Gas-Sensors — •Shipu Xu, Huaping Zhao, Yang Xu, Rui Xu, Huanming Zhang, and Long Liu — Institut für Physik & IMN MacroNano (ZIK), Technische Universität Ilmenau, 98693, Ilmenau, Germany

Gas-sensors formed by a nanostructure array are of advanced features such as large surface area in sensing, which are also morphology- and arrangement-parameter dependent. Herein, we show a template-assisted method to fabricate nanostructure-array-based gas-sensors, by which the morphology of the arrays can be controlled on a large scale. Using colloidal monolayer and anodic aluminum oxide as a template, we get nanoporous films and nanorod arrays, respectively. By adjusting the pore size of the porous film, the SnO2 sample exhibit a low detection limit of 100 ppm ethanol gas. Additionally, a much lower detection limit of 6 ppm ethanol gas is achievable by controlling the arrayed nanorod length. Based on the above, we confirm that the template-assisted method can be used to fabricate a gas-sensor with high sensitivity.