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MM: Fachverband Metall- und Materialphysik

MM 47: Poster Session II

MM 47.31: Poster

Mittwoch, 14. März 2018, 18:30–19:45, Poster C

Optical properties of ALD deposited ZnO as a functional sensing layer based on self-assembled mesoporous membranes — •Katharina Spangenberg, Stefan Ostendorp, Martin Peterlechner, and Gerhard Wilde — Institute of Materials Physics, WWU Münster, Germany

Large scale nanopatterns can be generated by using anodic aluminum oxide (AAO) masks which are porous alumina membranes fabricated in an electrochemical dissolution of aluminum in an acidic electrolyte. AAO is utilized as a self-assembled mesoporous template for producing an ordered nano-array of zinc oxide (ZnO) via atomic layer deposition (ALD). Its structure is well controllable and the correlation with optical properties can be closely studied.

The characterization of structural properties by scanning electron microscopy (SEM) and atomic force microscopy (AFM), as well as X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDX) and optical spectrometry, reveals the dependence of template based ZnO growth and microstructure on the process parameters during sample synthesis. The results show that the emission wavelength of nanostructured ZnO is tunable. The applicability of AAO embedded ZnO structures as a functional sensing layer is evaluated and discussed.