Berlin 2018 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 47: Poster Session II

MM 47.32: Poster

Mittwoch, 14. März 2018, 18:30–19:45, Poster C

Anodic Aluminum Oxide AAO as a template for the synthesis of ZnO nanostructures via Atomic Layer Deposition — •Hanaa Seso, Stefan Ostendorp, Martin Peterlechner, and Gerhard Wilde. — Institute of Materials Physics, Westfälische-Wilhelms-University, Wilhelm-Klemm-Str.10, Münster, Germany

The anodization of aluminum can result in two different types of oxides, a Compact barrier type anodic film and a porous oxide film. The synthesis of this latter anodic aluminum oxide (AAO) and its application as a template for the fabrication of metal oxide nanostructures by atomic layer deposition (ALD) is described. the ALD is ideal for performing precise depositions of metal oxide (ZnO) nano-tubes with different diameter and wall thicknesses within the pores of AAO .the effect of the growth temperature , ranging from 100 °C to 250 °C ,on the formed ZnO is investigated . the bare and ZnO *coated AAO were characterized by scanning electron microscopy (SEM) , energy dispersive X-ray analysis (EDAX) , atomic force microscopy (AFM), X-ray diffraction electron microscopy (TEM) . The roughness and crystallinity of the as * prepared ZnO layers are discussed.