Berlin 2018 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 48: Poster: 2D Materials beyond Graphene: TMDCs, Silicene and Relatives

O 48.8: Poster

Dienstag, 13. März 2018, 18:15–20:30, Poster A

Effects of substrate on defects production in 2D inorganic materials under ion irradiation in Helium Ion Microscope — •Sadegh Ghaderzadeh¹, Silvan Kretschmer¹, Mikhail Maslov^{1, 2}, Mahdi Ghorbani-Asl¹, and Arkady Krasheninnikov^{1, 3} — ¹Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany — ²Moscow Institute of Physics and Technology, Dolgoprudny, Russia — ³Department of Applied Physics, Aalto University School of Science, Finland

Helium Ion Microscope (HIM) does not only provide high-resolution images of the samples, but also creates the possibility of changing their morphologies in a controllable manner by introducing defects. Recently, two-dimensional (2D) materials including transition-metal dichalcogenides (TMDCs) have drawn attention as the promising building blocks for the future electronic devices. Exposure to energetic He ions has been shown to give rise to defect formation, but the mechanism of defect production in the TMDC samples on substrates is not fully understood. In this work, we study the effects of substrates on the creation of defects in 2D materials under He ion irradiation. Using a binary collision approach and analytical potential molecular dynamics, we show that while at low (less than 500 eV) He ion energies defects appear mostly due to direct ion impacts, at high energies defect creation is dominated by backscattered ions and atoms sputtered from the substrate. Our results provide microscopic insights into defect formation mechanisms in supported 2D materials.