Berlin 2018 – scientific programme

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O: Fachverband Oberflächenphysik

O 49: Poster: Nanostructures on Surfaces I

O 49.13: Poster

Tuesday, March 13, 2018, 18:15–20:30, Poster A

Material sensitive reconstruction of nanostructures based on finite-element simulations of complementary X-rays measurements — •Victor Soltwisch, Analia Fernandez Herrero, Philipp Hönicke, Mika Pflüger, Burkhard Beckhoff, and Frank Scholze — Physikalisch-Technische Bundesanstalt, Berlin

In order to model visible light scattering, rigorous calculations of the near and far field by numerically solving Maxwell's equations with a finite-element method are well established. The application of this technique to X-rays is still challenging, due to the discrepancy between the incident wavelength and the discretization size. We show that a rigorous calculation of the near and far field is still suitable for grazing incidence techniques e.g. grazing incidence small angle X-ray scattering (GISAXS) or grazing incidence X-ray fluorescence (GIXRF) and 2D periodic nanostructured surfaces. The flexibility of the finite-element approach in combination with statistical evaluations allows for parameter reconstruction of the surface shape with sub-nm uncertainty. This combined toolset of scattering and fluorescence measurements with rigorous simulations paves the way for a versatile characterization of nanoscale structured surfaces.