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O: Fachverband Oberflächenphysik

O 59: Nanostructures at surfaces: 1D and 2D structures and networks I

O 59.2: Vortrag

Mittwoch, 14. März 2018, 10:45–11:00, MA 141

Texture, morphology and microstructure of nanostructured Ti thin films grown by oblique angle deposition — •Susann Liedtke, Christoph Grüner, Jürgen W. Gerlach, Andriy Lotnyk, and Bernd Rauschenbach — Leibniz Institute of Surface Engineering (IOM), Permoserstraße 15, D-04318 Leipzig, Germany

Highly porous, sculptured metallic thin films are interesting for numerous applications such as electrodes in fuel cells and Li-ion batteries as well as for surface enhanced Raman sensors. Combining electron beam evaporation and oblique angle deposition (OAD) represents a powerful method to sculpture such thin films consisting of separated, tilted nano-sized columns. Tailoring the properties of the thin films requires the ability to control the shape of the nano-sized columns precisely. Although considerable research has been performed on insulating and semi-conducting OAD-structures, the growth of metallic OAD-structures still remains only fragmentarily understood. However, it is known that the angle of the incoming particle flux θ and the substrate temperature T influence the growth of such columns significantly. The experimental setup allows covering a substrate temperature range between 77 K < T < 1000 K, while the angle of the incoming particle flux can be varied between 0° < θ < 90°. The presentation focuses on the texture, morphology and microstructure of Ti porous thin films depending on these parameters. The samples were deposited on natively and thermally oxidized Si(100) substrates. Analysis was carried out using X-ray diffraction in-plane pole figure measurements, scanning electron microscopy and transmission electron microscopy.