Berlin 2018 – scientific programme

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 2: Vacuum Generation and Measurement

VA 2.1: Invited Talk

Monday, March 12, 2018, 10:15–11:00, A 060

DIJ: New energy-efficient type of oil diffusion pump — •Stefan Lausberg — Leybold GmbH, Bonner Str. 498, 50968 Köln, Germany

A century passed since the diffusion pump was invented by Wolfgang Gaede and it remained the high vacuum pump of choice for a very long time. Nowadays diffusion pumps are operated with oil which is not allowed for many applications, the most prominent example being semiconductor production. With the rise of turbomolecular pumps and cryopumps oil diffusion pumps were more and more replaced. Still their huge benefits have kept oil diffusion pumps relevant in modern vacuum systems. They are robust and relatively inexpensive for the performance they can deliver. However they require high energy consumption due to their principle of operation.

Leybold has now developed the DIJ: a new energy-efficient type of oil diffusion pump which saves energy in a number of ways. An energy saving unit controls the electrical heaters to keep the desired temperature with minimum power consumption. This also reduces the required cooling capacity of the chiller that supplies cooling water to the pump. On the other hand a thermal isolation reduces the heat flow to the environment. Finally, a new immersion heater design results in an optimized energy transfer to the oil. In this talk we will present the properties and benefits of this new type of diffusion pump in contrast to other high vacuum pumps.