Erlangen 2018 – scientific programme
Parts | Days | Selection | Search | Updates | Downloads | Help
A: Fachverband Atomphysik
A 36: Precision Measurements and Metrology (Gravity and Miscellaneous) (joint session Q/A)
A 36.4: Talk
Thursday, March 8, 2018, 11:15–11:30, K 2.013
Fabrication Process Control of Wire Grid Polarizers for the Deep Ultraviolet- by Transmission Spectroscopy in the Visible Spectral Range — •Walter Dickmann1, Thomas Siefke2, Johannes Dickmann3, Carol Bibiana Rojas Hurtado3, and Stefanie Kroker1,2 — 1Technische Universität Braunschweig, LENA Laboratory for Emerging Nanometrology — 2Friedrich-Schiller-Universität Jena, Institute of Applied Physics — 3Physikalisch-Technische Bundesanstalt Braunschweig
Wire grid polarizers (WGPs) are periodic nano-optical metasurfaces which act as polarizing elements. In the deep ultraviolet (DUV) region the performance of metallic WGPs is poor whereas wide bandgap semiconductors are promising materials for this spectral range. RCWA calculations provide extinction ratios (ERs) of up to 104. However, so far fabricated titanium dioxide WGPs achieved only ERs which are almost two orders of magnitude smaller than the simulated values. This is mainly due to surface roughness and deterministic structural deviations resulting from the fabrication process and approaching the size range of the structural features for short application wavelengths. In this contribution we present a method to characterize deterministic structural deviations of DUV polarizers at the nanometer scale by transmission spectroscopy in the visible spectral range. The achieved results lay the foundation for an in situ fabrication process control.
This research is supported by the DFG within research training group ’Metrology for Complex Nanosystems’ (GrK 1952/1) and within project ’PolEx’ (KR4768/1-1).