Erlangen 2018 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 13: Low Pressure Plasmas - Poster

P 13.4: Poster

Dienstag, 6. März 2018, 16:15–18:15, Redoutensaal

Experimental studies of momentum transfer during sputtering with interferometric force probes — •Mathis Klette, Thomas Trottenberg, and Holger Kersten — Institute of Experimental and Applied Physics (IEAP), Kiel University, Germany

In this work an ion beam is focused on a plane sputter target at different angles of incidence. The resulting sputter plume is characterized using Interferometric force probes [*]. In contrast to conventional diagnostics, a force probe does not rely on charged particles, but takes also neutrals into account and supports a more comprehensive picture of the sputtering process. The force vector resulting from implanted and reflected beam particles and sputtered target atoms is measured using a double axis force probe. A second force probe is used to circle around the target scanning through the resulting plume of sputtered target atoms and beam particles. The determined forces are then compared with simulation data using SRIM [**]. The experimental setup allows a variation of angle of incidence, target material, ion energy, gas type and gas pressure.

[*] Spethmann, A., Trottenberg, T., Kerst en, H., Phys. Plasmas 24(2017), 093501.

[**] J. Biersack and L. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).