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P: Fachverband Plasmaphysik

P 16: Low Pressure Plasmas II

P 16.2: Vortrag

Mittwoch, 7. März 2018, 14:30–14:45, KI 1.174

Stochastic electron heating in a periodically structured electric field — •Philipp Ahr, Tsanko V. Tsankov, and Uwe Czarnetzki — Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany

Recently a novel mechanism for stochastic electron heating in inductively coupled plasmas has been proposed theoretically by Czarnetzki and Tarnev [1]. It considers the movement of electrons in a plane parallel to the inductive coil, in contrast to the common case, where only the electron motion perpendicular to the planar coil is considered. It was shown that when the electrons move through a periodically structured electric field there exist the possibility for a non-local energy gain, which leads to a production of high energetic electrons.

To realize such a periodically structured electric field, a novel plasma source, the Inductive Discharge Array (IDA), has been assembled. Here, a short overview over the theory and the construction details of the source will be given. Further, recent results from optical and Langmuir probe measurements for the characterisation of the source will be presented. These show the existence of high energetic electrons at pressures where the energy relaxation length for inelastic collisions becomes larger than the chamber dimensions. As a consequence, the distribution function of these electrons become maxwellian for energies up to 40 eV.

[1] U. Czarnetzki and Kh. Tarnev, Phys. Plasmas 21, 123508 (2014)