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P: Fachverband Plasmaphysik

P 17: Atmospheric Pressure Plasmas - Poster

P 17.11: Poster

Mittwoch, 7. März 2018, 16:15–18:15, Zelt Ost

Geometrical dependent characterisation of a microplasma reactor with four sub-arrays — •Sebastian Dzikowski and Volker Schulz-von der Gathen — Experimentalphysik II, Ruhr Universität Bochum, Bochum, Germany

Microplasma pixel devices are interesting for large scale applications such as gas reformation. A representative is a metal grid array device, which is a stable alternative to silicon-based arrays. It consists of a dielectric sheet, a grounded and a powered electrode with symmetrically arranged cavities. The grounded electrode is realized by a magnet that pulls the grid to a simple sticked device. Typically, microplasma arrays are operated close to atmospheric pressure with noble gases like argon or helium. By applying a bipolar voltage waveform with an amplitude of 800 V peak-to-peak and a frequency of 10 kHz, the discharge is ignited in the cavities having a diameter of about 200 and depth of 50 micrometers.

As a comparison for a silicon-based multiple trench array discharge reactor a first reactor consisting of four metal-grid arrays was developed. The four grids are different in their cavity diameter and spacing. Here, we present time and spatial dependent optical investigations about ignition timing and line ratios of several gas mixtures including molecular admixture by using phase resolved optical emission spectroscopy.