Erlangen 2018 – scientific programme
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P: Fachverband Plasmaphysik
P 2: Low Pressure Plasmas I
P 2.6: Talk
Monday, March 5, 2018, 12:00–12:15, KI 1.174
Spectroscopic investigations of plasma nitrocarburizing processes with a mid-infrared frequency comb — Norbert Lang1, Alexander D. F. Puth1, Grzegorz Kowan2, Stephan Hamann1, Jürgen Röpcke1, Piotr Masłowski2, and •Jean-Pierre H. van Helden1 — 1Leibniz Institute for Plasma Science and Technology, Greifswald, Germany — 2Institute of Physics, Nicolaus Copernicus University, Torun, Poland
We report on the use of mid-infrared broadband direct frequency comb spectroscopy (DFCS) as a novel plasma diagnostic applied to spectroscopic investigations of plasma nitrocarburizing processes. With DFCS many molecular species can be detected simultaneously with high sensitivity and time-resolution yielding comprehensive data on their kinetics in the plasma and their interactions with a surface. Active screen plasma nitrocarburizing (ASPNC) is an advanced technology for the hardening of steel components using pulsed N2-H2 plasmas with an active screen made of solid carbon to produce carbon-containing species, which support the generation of anti-corrosive layers of high quality. However, many plasma chemical phenomena are far from completely understood. Therefore, spectroscopic investigations are being carried out in a downscaled plasma reactor based on an industrial scale ASPNC reactor. Our frequency comb operates around 3.2 µm (2900-3500 cm−1), the fingerprint region for key process species such as NH3, C2H2, C2H6, HCN, and CH4 molecules. We will discuss the workings of DFCS and the influence of pressure, screen plasma power, and gas mixture on the concentrations of these species.