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P: Fachverband Plasmaphysik

P 22: Complex Plasmas and Dusty Plasmas - Poster

P 22.2: Poster

Mittwoch, 7. März 2018, 16:15–18:15, Zelt West

Controlled transport and extraction of charged nanoparticles through the plasma-sheath in an acetylene RF plasma — •Zahra Marvi, Erik von Wahl, Thomas Trottenberg, and Holger Kersten — Institute of Experimental and Applied Physics, Kiel University, Germany

As nano-sized dust particles have been shown to exhibit interesting properties, which can be applied in innovative materials, there is a strong need to control the extraction of these dust particles from the plasma. One of the most important challenges about dust transport is the accurate description of the force balance which is coupled with the ion and electron currents onto the dust particle surface in electrostatic field along the plasma-sheath.

In this work, we propose a multi-fluid approach to investigate the charging process, force balance and transport of the nanoparticles through the plasma sheath between a nanodust forming CCRF plasma and a biased silicon substrate. The requirements for the extraction of nanoparticles for differently biased substrates are investigated both in simulation and experiment, respectively, and the results are compared with together.