Erlangen 2018 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 4: Matter Wave Optics I
Q 4.8: Vortrag
Montag, 5. März 2018, 12:15–12:30, K 1.013
Spherical aberration correction in a scanning transmission electron microscope using a sculpted thin film — •Roy Shiloh1,3, Roei Remez1, Peng-Han Lu2, Lei Jin2, Yossi Lereah1, Amir H. Tavabi2, Rafal E. Dunin-Borkowski2, and Ady Arie1 — 1School of Electrical Engineering, Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv, Israel — 2Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich, Germany — 3Currently at: Department Physik, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), 91058 Erlangen, Germany
Nearly eighty years ago, Scherzer showed that rotationally symmetric, charge-free, static electron lenses are limited by an unavoidable, positive spherical aberration. A major breakthrough in the spatial resolution of electron microscopes was reached two decades ago by abandoning the first of these conditions, with the success of multipole aberration correctors. Here, we use a refractive silicon nitride thin film acting as a diffractive optical element for free electron beams, to tackle the second of Scherzer's constraints and demonstrate an alternative method for correcting spherical aberration in a scanning transmission electron microscope. We reveal features in Si and Cu samples that cannot be resolved in an uncorrected microscope. Our thin film corrector can be implemented as an immediate low cost upgrade to existing microscopes without re-engineering of the column or complicated operation protocols, can correct additional aberrations and may be useful in other beamline schemes such as particle accelerators and free electron lasers.