Aachen 2019 – wissenschaftliches Programm

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T: Fachverband Teilchenphysik

T 54: Direkte Suche nach Dunkler Materie III

T 54.6: Vortrag

Mittwoch, 27. März 2019, 17:25–17:40, H09

Investigation of Production Techniques for Sputtered Tungsten Thin Films — •Tobias Ortmann, Angelina Kinast, Alexander Langenkämper, Elizabeth Mondragon, Andrea Münster, Luca Pattavina, Walter Potzel, Stefan Schönert, Raimund Strauß, and Michael Willers for the CRESST collaboration — Technische Universität München, Physik Department, Lehrstuhl E15, James-Franck-Str. 1, D-85748 Garching

The CRESST experiment (Cryogenic Rare Event Search with Superconducting Thermometers) searches for nuclear recoils events induced by elastic scattering of dark matter particles off the target nuclei within CaWO4 target crystals. The detectors are operated at a temperature of (10 mK) and consist of the target crystal and a separate cryogenic detector. Both heat (phonon) and light signals are read out via a tungsten TES (Transition Edge Sensor) utilizing the superconducting phase transition of tungsten to measure the energy deposited in the absorbers. Until now the TES are produced via electron beam physical vapor deposition. For future large scale production the application of magnetron sputtering is investigated in terms of film quality and reproducibility. Several sputtering techniques were examined and the results are presented. This work was supported by the DFG Excellenzcluster Origin and Structure of the Universe, the SFB 1258 and the Maier-Leibnitz- Laboratory (Garching).