Freiburg 2019 – wissenschaftliches Programm

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FM: Fall Meeting

FM 9: Quantum Networks: Platforms and Components I

FM 9.1: Talk

Montag, 23. September 2019, 14:00–14:15, 1098

Fabrication of Diamond Membranes for Photonic Structures — •Julia Heupel, Johann Peter Reithmaier, and Cyril Popov — Institute of Nanostructure Technologies and Analytics, Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

Due to its exceptional physical and chemical characteristics, diamond in a form of thin membranes is a particularly promising material for high quality photonic devices. In this work we address at first the fabrication of two-dimensional photonic crystal slabs utilizing nanocrystalline diamond (NCD) membranes deposited on silicon dioxide/silicon substrates. For adjusting the NCD film thickness as well as for smoothening the intrinsically rough surface, a planarization process utilizing polymerized spin-on glass (SOG) was developed. The photonic crystal structures were prepared in NCD samples with planarized surface by means of electron beam lithography (EBL) and inductively coupled plasma reactive ion etching (ICP RIE). By underetching of the sacrificial silicon dioxide layer with a hydrofluoric acid solution, the photonic crystals were suspended in air. Additionally, we report on the structuring progress for thin monocrystalline diamond (MCD) membranes by ICP RIE, utilizing a diamond bulk mask with angled holes as an etch mask and different etching mixtures.