München 2019 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 16: Low Pressure Plasmas II
P 16.2: Vortrag
Donnerstag, 21. März 2019, 11:25–11:40, HS 21
Plasma chemical studies of nitrocarburizing plasmas with a carbon active screen in industrial and laboratory reactors — •Alexander Puth1, Stephan Hamann1, Lukas Kusýn1,2, Igor Burlacov3, Anke Dalke3, Horst Biermann3, Jürgen Röpcke1, and Jean-Pierre van Helden1 — 1Leibniz Institute for Plasma Science and Technology, Greifswald, Germany — 2Masaryk University, Brno, Czech Republic — 3Institute for Materials Engineering, TU Bergakademie Freiberg, Germany
Active screen plasma nitrocarburizing (ASPNC) is a process to enhance the tribological properties of steel components. As a possible advancement, the use of a carbon active screen as a substitute for carbon-containing feed gas admixtures is investigated. Therefore, carbon fibre composite screens have been studied in low-pressure pulsed dc N2-H2 plasmas on industrial- and laboratory-scale. The plasma chemical conditions were monitored in-situ by laser absorption spectroscopy (LAS) with tunable diode lasers (TDL), external-cavity quantum cascade lasers (EC-QCL), and a frequency comb.
We will present concentrations of CH3, CH4, C2H2, C2H4, C2H6, C2N2, CO, CO2, HCN, H2O, and NH3 in dependence on plasma power, gas pressure, flow, and precursor composition. Translational and rotational temperatures of selected species were determined by line profile analysis and Boltzmann plots. Measured concentrations ranged from 1012 to 1016 molecules cm−3, with temperatures reaching up to 800 K. Analysis of surface-microstructures of treated samples complements the LAS measurements for improved process understanding.