München 2019 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.15: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Phase resolved optical emission spectroscopy of a radio frequency discharge supported by Langmuir probe measurements — •Sören Wohlfahrt, Franko Greiner, Judith Golda, and Jan Benedikt — Institute of Experimental and Applied Physics, Kiel University, Germany

Phase-resolved optical emission spectroscopy (PROES) is a non-intrusive diagnostic suitable of delivering plasma parameters in RF-discharges and the electron dynamic in both atmospheric and low-pressure plasmas. The time-resolved emission of certain energy levels is measured and described with a set of rate equations corresponding to the dominant processes in the plasma. Thus, the electron temperature and electron energy distribution function (EEDF) can be derived [1]. However, these parameters strongly depend on the underlying model.

We use PROES and Langmuir probe diagnostics to investigate a low-pressure capacitively coupled discharge and present a comparison of both measurements.

[1] Schulze et al., J. Phys. D: Appl. Phys. 43 (2010) 124016 (8pp)