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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.24: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Properties of Nanodust Clouds in Reactive Argon Acetylene Plasmas for Open and Closed Electrode Geometries — •Alexander Schmitz, Oguz Han Asnaz, and Franko Greiner — Institut für Experimentelle und Angewandte Physik, Christian-Albrechts-Universität zu Kiel

The properties of a nanoparticle cloud created in a reactive argon acetylene plasma strongly depend on argon pressure and rf power as well as on the electrode geometry. Using a capacitively coupled parallel plate reactor with two circular electrodes where the radius of the electrode is equal to the electrode distance, creates a "closed system" with high nanoparticle density. In contrast, a single electrode design, where the electrode is rf driven with reference to the vacuum chamber, is a "open system" with low nanoparticle density. We present a systematic study of the shape and dynamics of the nanodust cloud for different open and closed electrode designs.