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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.34: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Experimental and modelling studies of the temperature distribution in a microwave plasma torch and on a deposition target — •Margarita Baeva¹, Frank Hempel¹, Ralf Methling¹, Detlef Loffhagen¹, Tom Trautvetter², Hardy Baierl², and Rüdiger Foest¹ — ¹Leibniz Institute for Plasma Science and Technology, 17489 Greifswald, Germany — ²Leibniz Institute of Photonic Technology, 07745 Jena, Germany

The applicability of an atmospheric-pressure microwave (MW, 2.45 GHz) plasma torch on multi-component doping of silica preforms has been studied. The determination of the plasma parameters in the plasma source and in the plume, where the interaction between the plasma and the precursor occurs, is of central importance. The plasma source includes a standard waveguide R26 and a quartz tube traversing at the position of maximum electric field of the fundamental mode TE₁₀. The plasma jet is directed towards a rotating substrate. Precursors are fed through an additional tube placed outside the plasma source. Pure argon and argon/oxygen mixtures are used in the modelling and experimental studies. A self-consistent model of the plasma source is employed to describe plasma, the electromagnetic and the hydrodynamic processes. Optical emission spectroscopy and thermography deliver the temperature in the region of plasma-precursor interaction and on the substrate, respectively. Experimentally determined temperatures are compared with the model predictions and discussed.
This work was supported by the Leibniz-Gemeinschaft under the grant
SAW-2017-IPHT-1.