Regensburg 2019 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 14: Poster

DS 14.19: Poster

Dienstag, 2. April 2019, 17:00–20:00, Poster E

Single-source, metalorganic, low-temperature growth of carbon nanowalls: the role of precursor dissociation — •Sebastian Tigges, Axel Lorke, and Nicolas Wöhrl — University of Duisburg-Essen and CENIDE, Faculty of Physics, 47057 Duisburg, Germany

Carbon nanowalls (CNWs) exhibit exceptional thermal as well as electrical conductivity and adjustable surface area. This makes them especially attractive for energy technologies (such as fuel cells) and application in sensors. Here, we investigate different CNW structures deposited at remarkably low temperatures (ca. 350°C). In an inductively coupled plasma-enhanced chemical vapour deposition system, specific morphologies are obtained by tuning essential process parameters such as flow rate of precursor gas and process pressure. Scanning electron microscopy reveals three distinct CNW structures of varying morphology and inter-wall distance. Raman spectroscopy shows significant variation in both defect density and defect type, depending on morphology. Additionally, X-ray photoelectron spectroscopy and Auger microscopy is used to determine the overall and spatially resolved chemical composition of different morphologies. Plasma characterization, specifically determination of the number density of light-emitting species in the plasma, is done by optical emission actinometry. It is illustrated, how the formation of individual morphologies is depending on the residence time of the complex precursor molecule, which is used as the carbon source in the process. From these observations a simple growth model is derived.