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DS: Fachverband Dünne Schichten

DS 14: Poster

DS 14.20: Poster

Dienstag, 2. April 2019, 17:00–20:00, Poster E

Sputter Deposition of Chalcogenide Superlattices with Varying Interfacial Diffusion — •Peter Kerres, Henning Hollermann, Kai Scheuvens, Matthias Dück, and Matthias Wuttig — I. Institue of Physics (IA), RWTH Aachen University

Superlattices consisting of thin layers of germanium telluride (GeTe) and antimony telluride (Sb₂Te₃) are currently considered as energy efficient phase-change memory devices. In order to unravel the detailed switching mechanism, the determination of the superlattice structure is crucial. Sputter deposition of the constituents offers a broad parameter window, thereby enabling a systematic investigation of samples with varying structure and morphology. This study focusses on the interdiffusion at adjacent GeTe/Sb₂Te₃ heterointerfaces employing X-Ray Diffraction (XRD). A series of superlattice samples has been deposited on a mica substrate, while the amount of interdiffusion is varied with the applied deposition temperature. Structural changes in the samples are monitored with θ−2θ XRD scans. The significant changes in the measurements are then compared with simulations, which take the disorder into account.