Regensburg 2019 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 14: Poster

DS 14.6: Poster

Dienstag, 2. April 2019, 17:00–20:00, Poster E

Fabrication of nanostructured oxides by focused electron beam induced processing — •Elif Bilgilisoy, Christian Preischl, Florian Vollnhals, and Hubertus Marbach — Lehrstuhl für Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Egerlandstr. 3, D-91058, Erlangen, Germany

We explored techniques employing a highly focused electron beam in UHV for the controlled fabrication of nanostructured oxide surfaces. This can be done by electron beam induced local modification of the substrate such that it becomes active towards the decomposition of subsequently dosed precursor molecules, referred to as electron beam induced surface activation (EBISA)[1]. The initial deposits might grow autocatalytically upon prolonged precursor dosage already at room temperature in our UHV instrument. EBISA requires a surface that can be correspondingly activated by the electron beam. We could identify oxides like Si_xO_y and TiO₂ as suitable candidates [2, 3]. Thereby EBISA worked successfully with Fe(CO)₅ and Co(CO)₃NO depending on the actual substrate partially with chemical selectivity. As activated sites we could identify reactive oxygen vacancies created through electron beam induced stimulated oxygen desorption. Along with the presentation of these results, we will also demonstrate first successful results on Cobalt oxide generalizing the EBISA process on oxides.

[1] Marbach, H., Applied Physics A, 117(3): p. 987-995 (2014).

[2] Drost, M., et al., Small methods, 1(6): p. 1700095 (2017).

[3] Walz, M.-M., et al., Physical Chemistry Chemical Physics, 13(38): p. 17333-17338 (2011).