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DS: Fachverband Dünne Schichten

DS 14: Poster

DS 14.8: Poster

Dienstag, 2. April 2019, 17:00–20:00, Poster E

Direct Write, Free Form 3D Nanomagnetism — •Lukas Keller and Michael Huth — Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany

3D nano-printing by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics [1] and plasmonics.

Our pattern file generator program [2], which defines the electron beam movement at any time during the deposition, handles precursor dynamic related issues like proximity effects and corrects for height-dependent precursor coverage. The target geometry can be defined by hand or using powerful 3D software tools like "blender" [3].

Here we present a selection of successfully deposited magnetic 3D nano-structures, generated with our implementation of a pattern file generator, and some measured hysteresis loops of their magnetic stray field. We demonstrate that also 3D mixed material structures are available by combining ferromagnetic with paramagnetic 3D elements.
: Scientific Reports 8, 6160 (2018)
: Beilstein J. Nanotechnol., 9, 2581-2598 (2018)
: https://youtu.be/v8s24WvGj9E