Regensburg 2019 – scientific programme

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DS: Fachverband Dünne Schichten

DS 24: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...) Part I

DS 24.10: Talk

Thursday, April 4, 2019, 17:30–17:45, H39

Reference-free quantification of thin layered alloys with synchrotron radiation based experiments — •André Wählisch, Cornelia Streeck, and Burkhard Beckhoff — Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany

X-ray fluorescence analysis is a nondestructive technique to investigate a wide range of different materials. Quantitative results of unknown samples are typically obtained by utilizing well known reference samples. Alloyed multilayers with layer thicknesses in the order of one micrometer were analyzed in the present work. Since for this type of material appropriate reference materials are often not available, a reference-free approach based upon SI traceability is employed by the Physikalisch-Technische Bundesanstalt (PTB), the national metrology institute of Germany. The PTB operates fully characterized beamlines at the electron storage ring BESSY II in Berlin. The radiometrically calibrated instrumentation and the reference-free fundamental parameter approach using monochromatized synchrotron radiation allow for a direct quantification of the mass deposition of individual layers in the multilayers and a reliable uncertainty budget can be calculated.