Regensburg 2019 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 11: Focus: Advanced TEM spectroscopy - low energy excitations and chemical composition at high resolution (joint session KFM/HL)
HL 11.8: Vortrag
Montag, 1. April 2019, 18:00–18:20, PHY 5.0.20
High-resolution EFTEM at very low accelerating voltages — •Martin Linck1, Michael Mohn2, Johannes Biskupek2, Heiko Müller1, Stephan Uhlemann1, and Max Haider1 — 1CEOS GmbH, Englerstr. 28, D-69126 Heidelberg, Germany — 2Central facility of electron microscopy, Ulm University, Albert-Einstein-Allee 11, D-89081 Ulm, Germany
Simultaneous correction of both, spherical and chromatic aberration in a dedicated low-voltage transmission electron microscope (TEM) has enabled atomic resolution TEM observations on beam sensitive materials at beam energies from 20 to 80 keV (SALVE project). The reduction of focus spread due to chromatic aberration correction, however, not only allows for highest resolution atomic phase contrast (elastic zero-loss imaging) but also enables high-resolution imaging capabilities over significant energy windows in energy-filtered (EF)TEM. In order to provide a significant field of view on the energy filter's camera device, it is essential that the corrector is free of chromatic distortions, i.e. image distortions which change with electron energy. It has been shown that the SALVE corrector is well-suited for such ambitious investigations. First experimental results, in fact, show that high-resolution EFTEM is feasible in the SALVE microscope. The subsequent interpretation of such data, however, is very challenging due to the multiple scattering, i.e. mixture of elastic and inelastic scattering.