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HL: Fachverband Halbleiterphysik

HL 2: Nitrides: Devices

HL 2.10: Vortrag

Montag, 1. April 2019, 12:00–12:15, H31

Blue micro-LEDs on Si(111) for optogenetic applications — •Silvio Neugebauer¹, Jürgen Bläsing¹, Armin Dadgar¹, André Strittmatter¹, Martin Deckert², Bertram Schmidt², Michael Lippert³, and Frank Ohl³ — ¹Institute of Physics, Otto-von-Guericke-University Magdeburg, Germany — ²Institute for Micro and Sensor Systems, Otto-von-Guericke-University Magdeburg, Germany — ³Department of System Physiology and Learning, Leibniz Institute for Neurobiology Magdeburg, Germany

Optogenetics is a technique that builds on light-sensitive proteins to control neural activity in genetically modified neurons. In order to circumvent problems associated with the use of single optical fibers for excitation, arrays of miniaturized LEDs on a flexible host are a viable solution allowing in addition for a light-patterning approach. In this study we have optimized InGaN/GaN LED heterostructures on Si(111) substrates with low total layer thickness and their processing into micro-sized LEDs for the integration onto flexible polyimide membranes. Special emphasis was put on obtaining stress-free wafers after growth and to keep the thickness of the layer stack below 5 µm. Subsequently, arrays of circular µLEDs with diameters from 60-160 µm were fabricated. Devices exhibit constant J-V characteristics for the range of diameters investigated. We will further report on full-wafer removal of the silicon substrate to obtain freestanding µLEDs that can be transferred one-by-one onto a polyimide optical electrode.