Regensburg 2019 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 28: Diamond II (joint session KFM/HL)
HL 28.3: Vortrag
Mittwoch, 3. April 2019, 10:10–10:30, PHY 5.0.20
Improving magnetic nanoimaging using diamond-AFM-tips containing NV centers — •Arne Götze, Christoph Schreyvogel, Christian Giese, Claudia Widmann, Christoph Nebel, and Oliver Ambacher — Fraunhofer Institut für angewandte Festkörperphysik, Tullastraße 72, 79108 Freiburg, Germany
The fabrication of microelectronic components is approaching its physical limits. The gate length of modern transistors is now below 10 nm. Further miniaturization could lead to a reduction in costs and energy consumption, but as the devices become smaller the failure rate during production increases. Diamond-AFM-tips containing single NV centers that enable the imaging of the magnetic field strength with high sensitivity and spatial resolution even at room temperature will help uncover the reasons for this.
The focus of our work is to improve the performance of the NV-tips by producing diamond with high crystal quality and single NV centers. One goal is to create single NV centers close to the surface of the tip during CVD diamond growth by coating microstructured diamond tips with a thin layer of N-doped diamond. This will lead to longer spin coherence times and improved sensitivity compared to N-implantation. In order to better understand the N-doping and NV-formation processes we study the tips by using a confocal microscope and measuring 3D photoluminescence distributions. With this knowledge we are able to tailor the CVD processes and improve the measurement capabilities of magnetic imaging using diamond-AFM-tips.