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HL: Fachverband Halbleiterphysik

HL 35: HL Poster II

HL 35.8: Poster

Mittwoch, 3. April 2019, 17:30–20:00, Poster E

Optical properties of oxygen-doped TiN thin films — •Felix-Florian Delatowski, Chris Sturm, Michael Lorenz, Florian Jung, Stefan Hohenberger, and Marius Grundmann — Felix-Bloch-Institut für Festkörperphysik, Universität Leipzig, Linnéstraße 5, 04103Leipzig

The epitaxial growth of MgO and TiN superlattices allows the realization of optical hyperbolic metamaterials [1]. Due to the high oxygen affinity of titanium, diffusion of the oxygen of the MgO layer into the TiN layers takes place [2]. Here we investigate the structural and optical properties of oxygen-doped TiN thin film layers as a function of the doping concentration in order to understand the impact of the oxygen doping on the properties of the superlattices. The thin films were fabricated by pulsed laser deposition on MgO substrates [3]. The oxygen doping was realized by using an oxygen-argon gas mixture during the deposition process.

The crystal properties and the thickness were measured using X-ray diffraction and reflection, whereas atomic force microscopy was used in order to investigate the surface properties. The dielectric function of the thin films was determined by spectroscopic ellipsometry. We found hints that even for an oxygen-argon gas mixture of 1:99 and less, we obtain a deposition of titanium oxides instead of TiN.

[1] G. Naik et al., PNAS 111, 7546-7551 (2014)

[2] F. Jung, Optical and structural properties of TiN/MgO superlattices, Master thesis (Universität Leipzig) (2018).

[3] M. Bonholzer et al., Phys. Status Solidi A 211, 2621-2624 (2014).