Regensburg 2019 – scientific programme
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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 13: Microscopy, Tomography and Spectroscopy with X-ray Photons, Electrons, Ions and Positrons (joint session KFM/HL)
KFM 13.5: Talk
Wednesday, April 3, 2019, 10:50–11:10, H47
Thickness Determination on Molecular Thick Carbon Nanomembranes by HIM, XPS and EFTEM — •Daniel Emmrich1, Annalena Wolff2, Nikolaus Meyerbröker3, Jörg K. N. Lindner4, André Beyer1, and Armin Gölzhäuser1 — 1Bielefeld University, Germany — 2Queensland University of Technology, Australia — 3CNM Technologies GmbH, 33607 Bielefeld, Germany — 4Paderborn University, Germany
The Helium Ion Microscope (HIM) offers a lateral imaging resolution of 0.3 nm and is known for its excellent sub 10 nm milling capabilities [1]. While imaging with secondary electrons (SE) is well established for this microscope, the ion transmission signal attracts growing attention. Imaging in transmission offers additional information on membranes [2] and core shell nanoparticles [3]. Monolayer thin membranes have not been studied so far. Our systems are molecular thick Carbon Nanomembranes which are made of self-assembled monolayers that are cross-linked by low energy electrons [4]. We are able to measure dark field transmission of the same sample area at different acceptance angles using a SE conversion holder. The image contrast at different acceptance angles is compared to simulations and the membrane thickness is determined. We demonstrate our concept for different energies and thicknesses. We compare our results to standard techniques, e.g., XPS and EFTEM. [1] G. Hlawacek, A. Gölzhäuser (Eds.), Springer Intl., Switzerland 2016. [2] A. R. Hall, Microsc Microanal 2013, 19, 740. [3] T. J. Woehl et al., Microsc Anal, 2016, 22, 544. [4] A. Turchanin, A. Gölzhäuser, Adv. Mater 2016, 28, 6075.