Regensburg 2019 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 20: Poster session II
MM 20.11: Poster
Dienstag, 2. April 2019, 18:30–20:00, Poster C
In situ TEM in Liquids Using a Si3Ni4 – Graphene Hybrid Cell Design — •Birk Fritsch1, Andreas Hutzler1, Michael P. M. Jank2, Robert Branscheid3, Erdmann Spiecker3, and Martin März1,2 — 1Electron Devices (LEB), Department of Electrical, Electronic and Communication Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Cauerstraße 6, 91058 Erlangen, Germany — 2Fraunhofer Institute for Integrated Systems and Device Technology IISB, Schottkystraße 10, 91058 Erlangen, Germany — 3Institute of Micro- and Nanostructure Research (IMN) and Center for Nanoanalysis and Electron Microscopy (CENEM), Department of Materials Science and Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Cauerstraße 6, 91058 Erlangen, Germany
Liquid cell transmission electron microscopy (LCTEM) is a powerful technique to investigate chemical processes in situ on the nanoscale. Whilst commercial cell designs have the drawback that they need to be operated in a dedicated TEM holder and do not allow EDX analyses, we present an advanced design that overcomes these limitations and allows state-of-the-art in situ methods such as HRTEM, or EDXS.
Due to the chosen geometry, micropatterned wells in Si3N4 can be sealed with multi-layered graphene to bypass the shadowing effects in conventional micromachining-based liquid cells by simultaneously providing a defined cell volume. By exploiting these features, we demonstrate quantitative investigations of reaction kinetics of metal-based nanostructures and thus gain valuable insights into the underlying processes.