Regensburg 2019 – wissenschaftliches Programm

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TT: Fachverband Tiefe Temperaturen

TT 39: Focus Session: Direct-Write Nanofabrication and Applications I
(Electron Beam Induced Processing) (joint session DS/TT)

TT 39.4: Vortrag

Mittwoch, 3. April 2019, 10:30–10:45, H32

FEBIP on Self-Assembled-Monolayers and Carbon Nanomembranes — •Christian Preischl¹, Elif Bilgilsoy¹, Florian Vollnhals¹, Le Hoang Linh², Sascha Koch², Armin Gölzhäuser², and Hubertus Marbach¹ — ¹Physik. Chemie II, FAU Erlangen-Nürnberg, GER — ²PSS, Bielefeld University, GER

In our approach, we investigate two different FEBIP methods in UHV on Self-Assembled-Monolayers (SAM) and on nanometer thick Carbon Nanomembranes (CNM). These thin CNM sheets can be produced out of SAMs by electron-induced crosslinking.^[1] The two FEBIP methods of choice are EBID^[2] and Electron-Beam-Induced-Surface-Activation (EBISA). In EBISA, the surface is locally activated by an electron beam and the subsequently dosed precursor is catalytically decomposed at the activated sites and forms a deposit.^[3] These two approaches were explored on 1,1´,4´,1´´-terphenyl-4-thiol (TPT) and the corresponding cross-linked CNM with Fe(CO)₅ and Co(CO)₃NO. Whereas EBID works with both precursors on both substrates, EBISA can only be driven successfully on the non cross-linked TPT with Fe(CO)₅. Regarding this result, we observe a chemical selectivity in EBISA between the two precursors, which was already reported in previous studies on different substrates.^[4] Furthermore upon crosslinking, TPT loses its catalytic activity towards the EBISA process.

^[1] A. Turchanin, A. Gölzhäuser, Adv. Mater. 28 (2016), 6075 ^[2] W. van Dorp, C.W. Hagen, J. Appl. Phys. 104 (2008), 081301 ^[3] H. Marbach, Appl. Phys. A 117 (2014), 987 ^[4] Drost et al., Small Methods 1 (2017), 1700095; M. Drost et al., ACS Nano. 12 (2018), 3825