Regensburg 2019 – wissenschaftliches Programm

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TT: Fachverband Tiefe Temperaturen

TT 48: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

Mittwoch, 3. April 2019, 15:00–18:00, H32

Part II: New Approaches & Chemsitry
Organizers:
• Michael Huth, Physikalisches Institut, Goethe-Universität, Frankfurt, Germany
• Harald Plank, FELMI-ZFE, TU Graz, Austria
(Synopsis provided with part I of this session)

	15:00	TT 48.1	Hauptvortrag: Fabrication of functional nanostructures by electron and ion beams — •Milos Toth
	15:30	TT 48.2	Avoiding amorphization in silicon nano structures — •Gregor Hlawacek, Xiaomo Xu, Hans-Jürgen Engelmann, Karl-Heinz Heinig, Wolfhard Möller, Ahmed Gharbi, Raluca Tiron, Lothar Bischoff, Thomas Prüfer, Rene Hübner, Stefan Facsko, and Johannes von Borany
	15:45	TT 48.3	Non-classical Liquid Metal Ion Sources for advanced FIB nano-patterning — •Paul Mazarov, Lothar Bischoff, Wolfgang Pilz, Nico Klingner, Achim Nadzeyka, Jorg Stodolka, and Jacques Gierak
	16:00	TT 48.4	Opening the Door to New Beam Induced Processing Applications: A Compact and Flexible Gas Injection System — •Andrew Jonathan Smith, Klaus Schock, Andreas Rummel, and Stephan Kleindiek
	16:15	TT 48.5	FXBID - an X-ray based sibling to FEBIP — •Andreas Späth, Kim Thomann, Florian Vollnhals, Jörg Raabe, Kevin C. Prince, Robert Richter, Wolfgang Hieringer, Hubertus Marbach, and Rainer H. Fink
	16:30		15 min. break
	16:45	TT 48.6	Hauptvortrag: Fundamentals of low-energy electron induced dissociation of focused electron beam induced deposition precursors — •Oddur Ingólfsson
	17:15	TT 48.7	Which molecular structures in metal organic compounds are favourable for electron-induced decomposition? — Kai Ahlenhoff and •Petra Swiderek
	17:30	TT 48.8	Cisplatin as potential Pt FEBID precursor: NH3 ligands enhance the electron-induced removal of chlorine — •Markus Rohdenburg, Kai Ahlenhoff, Sascha Koch, Armin Gölzhäuser, and Petra Swiderek
	17:45	TT 48.9	Amidinate and carboxylate coordination compounds for focused electron beam induced deposition (FEBID) — Katarzyna Madajska and •Iwona Szymańska