Regensburg 2019 – scientific programme

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TT: Fachverband Tiefe Temperaturen

TT 48: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

TT 48.5: Talk

Wednesday, April 3, 2019, 16:15–16:30, H32

FXBID - an X-ray based sibling to FEBIP — •Andreas Späth¹, Kim Thomann¹, Florian Vollnhals¹, Jörg Raabe², Kevin C. Prince³, Robert Richter³, Wolfgang Hieringer⁴, Hubertus Marbach¹, and Rainer H. Fink¹ — ¹Physikalische Chemie II, FAU Erlangen-Nürnberg, Germany — ²Swiss Light Source, Paul Scherrer Institut, Villigen, Switzerland — ³Elettra Sincrotrone, Basovizza, Italy — ⁴Theoretische Chemie, FAU Erlangen-Nürnberg, Germany

Focused X-ray beam induced deposition (FXBID) is a novel technique for the additive fabrication of metallic nanostructures by illuminating metal organic precursor molecules with focused soft X-rays in a Fresnel zone plate based scanning transmission X-ray microscope (STXM)[1,2]. An advantage of the technique is the possibility to optimize precursor fragmentation by proper selection of the incident photon energy. For a better understanding of basic X-ray induced fragmentation processes, we have performed photon energy dependent mass spectrometry and secondary electron spectroscopy studies for several metal organic precursors[3]. The results are correlated with TD-DFT calculations of the molecular orbitals relevant for soft X-ray absorption and have been transferred to advanced deposition experiments. We have started to explore the capabilities of in-situ cleaning procedures (reactive gases, annealing, etc.) to enhance the chemical purity of FXBID deposits. The project is funded by DFG grant SP 1775/1-1.

[1] A. Späth et al., RSC Advances, 2016, 6, 98344.

[2] F. Tu et al., J. Vac. Sci. Technol. B, 2017, 35(3), 031601.

[3] A. Späth et al., Microsc. Microanal. 2018, 24(S2), 114.