Regensburg 2019 – scientific programme

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TT: Fachverband Tiefe Temperaturen

TT 62: Direct-Write Nanofabrication and Applications III
(Electron Beam Induced Processing) (joint session DS/TT)

TT 62.6: Talk

Thursday, April 4, 2019, 17:00–17:15, H32

3D Nano-Printing via FEBID: Complex 3D Nano-Structures — •Lukas Keller and Michael Huth — Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany

[3]: https://youtu.be/v8s24WvGj9E
Fabrication of three-dimensional (3D) nano-architectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics [1] and plasmonics. The main issue of generating a desired 3D nano-structure is to navigate the electron beam in the x-y-plane.
Here we present our pattern file generator program [2]. It considers several issues caused by limited precursor replenishment dynamics, which is important for the successful fabrication of 3D nano-structures. The target geometry can be defined by hand or using powerful 3D software tools like "blender" [3]. Several examples of 3D nano- and micro-structures using different precursors are presented.
: Scientific Reports 8, 6160 (2018)
: Beilstein J. Nanotechnol., 9, 2581-2598 (2018)
: https://youtu.be/v8s24WvGj9E