Regensburg 2019 – scientific programme

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TUT: Tutorials

TUT 4: Diamond-Growth, characterization, electronics and applications (joint session KFM/TUT)

TUT 4.2: Tutorial

Sunday, March 31, 2019, 16:45–17:30, H10

Microwave CVD of Diamond — •Volker Buck — Uni. Duisburg-Essen

The contribution starts with historic remarcs concerning microwave CVD of Diamond. Then basic physics of microwave plasmas are presented to explain the concepts of usual microwave reactors. After this, standard process parameters for deposition of microcrystalline diamond films are given. An overview of problems related with epitaxy leads to actual research and within this context also the state of the art of doping is discussed. Some general aspects of nanotechnology then leads to ultrananocrystalline diamond films (UNCD) and color centers. An outlook concludes the contribution.