Regensburg 2019 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 4: New Vacuum Gauges - Development and Characterization

VA 4.2: Vortrag

Montag, 1. April 2019, 14:40–15:10, H6

Combined total - partial pressure sensor — •Mihail Granovskij, Sergej Uchatsch, Klaus Bergner, Michael Flämmich, and Ute Berger — VACOM Vakuum Komponenten und Messtechnik GmbH, In den Brückenäckern 3, 07751 Großlöbichau

The recent progress in the development of a vacuum gauge with an integrated He-leak detector based on a novel ion source will be presented.

The fundamental idea of the vacuum gauge is the novel measuring principle: Instead of directly measuring the ion current, ions are accumulated inside an electron space charge region. The total pressure in the chamber is determined by the accumulation time that is necessary to collect a certain amount of ions. Thereby the capacity of the ion trap is independent from the prevailing pressure and is exclusively determined by the space charge density.

Furthermore, a short time-of-flight (TOF) path is connected to the ion source. On this route, the collected ions are separated according to their masses and measured at the Faraday Cup detector in a time separated manner. This enables the gauge to measure the residual gas composition. In particular a Helium leakage test can be carried out.

In the talk the underlying physical principles of the novel ion source are presented along with numerous experimental results. Next to total pressure and low mass spectrum measurements, the capability of analyzing the gas composition up to 50 m/z at high repetition rates is evaluated. Use cases for different final applications will be discussed.