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Wed, 15:00 | DS 19.1 | Invited Talk: Fabrication of functional nanostructures by electron and ion beams — •Milos Toth |
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Wed, 15:30 | DS 19.2 | Avoiding amorphization in silicon nano structures — •Gregor Hlawacek, Xiaomo Xu, Hans-Jürgen Engelmann, Karl-Heinz Heinig, Wolfhard Möller, Ahmed Gharbi, Raluca Tiron, Lothar Bischoff, Thomas Prüfer, Rene Hübner, Stefan Facsko, and Johannes von Borany |
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Wed, 15:45 | DS 19.3 | Non-classical Liquid Metal Ion Sources for advanced FIB nano-patterning — •Paul Mazarov, Lothar Bischoff, Wolfgang Pilz, Nico Klingner, Achim Nadzeyka, Jorg Stodolka, and Jacques Gierak |
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Wed, 16:00 | DS 19.4 | Opening the Door to New Beam Induced Processing Applications: A Compact and Flexible Gas Injection System — •Andrew Jonathan Smith, Klaus Schock, Andreas Rummel, and Stephan Kleindiek |
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Wed, 16:15 | DS 19.5 | FXBID - an X-ray based sibling to FEBIP — •Andreas Späth, Kim Thomann, Florian Vollnhals, Jörg Raabe, Kevin C. Prince, Robert Richter, Wolfgang Hieringer, Hubertus Marbach, and Rainer H. Fink |
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Wed, 16:45 | DS 19.6 | Invited Talk: Fundamentals of low-energy electron induced dissociation of focused electron beam induced deposition precursors — •Oddur Ingólfsson |
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Wed, 17:15 | DS 19.7 | Which molecular structures in metal organic compounds are favourable for electron-induced decomposition? — Kai Ahlenhoff and •Petra Swiderek |
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Wed, 17:30 | DS 19.8 | Cisplatin as potential Pt FEBID precursor: NH3 ligands enhance the electron-induced removal of chlorine — •Markus Rohdenburg, Kai Ahlenhoff, Sascha Koch, Armin Gölzhäuser, and Petra Swiderek |
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Wed, 17:45 | DS 19.9 | Amidinate and carboxylate coordination compounds for focused electron beam induced deposition (FEBID) — Katarzyna Madajska and •Iwona Szymańska |
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Thu, 09:30 | DS 21.1 | Invited Talk: Epitaxial graphene on SiC(0001) studied by electron spectroscopy and microscopy — •Florian Speck |