Dresden 2020 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 27: Focus Session: Functional Metal Oxides for Novel Applications and Devices I (joint session HL/DS)

DS 27.5: Hauptvortrag

Mittwoch, 18. März 2020, 16:45–17:15, POT 81

Engineering of LiNbO3 films for next generation acoustic and energy harvesting applications — •Ausrine Bartasyte, Samuel Margueron, Vincent Astié, Giacomo Clementi, Mihaea Ivan, and Merieme Oubahaz — FEMTO-ST Institute, University of Franche-Comté, Besançon, France

The next generation of high frequency wide-band RF filters or frequency-agile filters are urgently needed for the development of 5G infrastructures/networks/communications. Today, LiNbO3 and LiTaO3 single crystals are key materials in electro-optics and RF acoustic filters. This motivates further development of acoustic wave devices based on highly electromechanically coupled LiNbO3 thin films, adapted to the high-frequency applications. The challenges and the achievements in the epitaxial growth of LiNbO3 films and their integration with Si technology and to acoustic devices will be discussed in detail. The deposition techniques enabling the control of film composition/ nonstoichiometry of volatile alkali metal oxides & the methods of compositional analysis will be presented. We have demonstrated an extremely high acoustical performance compatible with filter applications for SAW devices, based on epitaxial LiNbO3 films, operating in the frequency range around 5 GHz. Moreover, it was demonstrated that the power density of 9.62 mW .cm-3 (comparable to present performance of lead-based piezoelectric harvester) can be harvested by vibrational energy transducer based on thick LiNbO3 films.