Dresden 2020 – scientific programme

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DS: Fachverband Dünne Schichten

DS 30: Poster: Organic Thin Films and Thin Oxides

DS 30.11: Poster

Wednesday, March 18, 2020, 15:00–18:00, P1A

Preparation of thin TiO2 films by DC magnetron sputtering for photocatalytic applications — •Osadebamwen Sandra Omoragbon, Anurag Pandey, Lu He, Teresa I. Madeira, and Dietrich R. T. Zahn — Semiconductor Physics, Chemnitz University of Technology, Reichenhainer Str. 70, 09126,Chemnitz, Germany

Fossil fuels have been massively burnt in order to keep up to the augmenting energy demands of the world. This has triggered the everincreasing carbon dioxide (CO2) emission. Photocatalytic reduction of CO2 into solar fuels and chemicals is a promising technology to contemporaneously curb the global warming and partially fulfill the energy requirements. Therefore, significant efforts are being put into the design and development of visible-responsive photocatalysts. Also TiO2 thin films are promising in this application even though they harvest light only in the ultraviolet range of the solar spectrum [1].

Here we report on preliminary studies of TiO2 thin films deposited on intrinsic, n-type and p-type silicon substrates by DC pulsed magnetron sputtering using a titanium metal target at room temperature and Ar and O2 as working gases. Thin films were deposited with different O2 gas flow rates (1, 3, 9, 12, 20 sccm) while keeping the Ar gas flow rate constant at 30 sccm. X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), and Raman Spectroscopy techniques were used to characterize the films. The main goal is to determine the conditions that lead to the best photocatalytic performance. [1] N. Shehzad, M. Tahir, K. Johari, T. Murugesan, A critical review on TiO2 based photocatalytic CO2, J. CO2 Util. 26 (2018) 98-122