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DS: Fachverband Dünne Schichten

DS 32: Poster: Optical Analysis of Thin Films

DS 32.4: Poster

Mittwoch, 18. März 2020, 15:00–18:00, P1A

Evaluation of thicknesses of polymer films on steel surfaces with spectroscopic ellipsometry — •Friedrich Bürger, Maria Sonnenberg, Lienhard Wegewitz, and Wolfgang Maus-Friedrichs — Clausthaler Zentrum für Materialtechnik, Technische Universität Clausthal, Leibnizstraße 9, 38678 Clausthal-Zellerfeld, Germany

In the production of polymeric foils, on the used steel surfaces a polymer residue builds up, that needs to be cleaned off after a certain film thickness. For this process it is important to have an idea of the films thickness remaining on these surfaces in situ. Here we evaluate if spectroscopic ellipsometry could be adapted for this purpose. Various thin polycarbonate (PC) films were therefore prepared by spin-coating. To change the film thickness in a different manner the samples were here treated with a dielectric barrier discharge (DBD) plasma. Afterwards measurements with an ellipsometer and a confocal laser scanning microscope (CLSM) were performed. This was repeated several times with different PC film thicknesses and plasma treatment times. Additionally, X-ray photoelectron spectroscopy was performed on different samples to detect possible change in composition of the films and the steel surfaces due to plasma treatment. As the thickness of the film measured by the CLSM decreased with increasing plasma treatment time, the measurements with the ellipsometer reflected this change. This indicates that spectroscopic ellipsometry could be adapted to evaluate the thickness of PC films in situ on steel surfaces when other methods are unavailable.