Dresden 2020 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 6: Thin Film Applications II

DS 6.3: Vortrag

Montag, 16. März 2020, 11:15–11:30, CHE 91

Novel Ion Detector with High Sensitivity for Multi-Ion Sensing — •Kun-Lin Liou, Ying-Chun Shen, Chien-Ping Wang, Yu-Lun Chueh, Chrong Jung Lin, and Ya-Chin King — National Tsing-Hua University 101, Sec. 2, Kuang-Fu Road, Hsinchu 30013, Taiwan, R. O. C

Nowadays, the ion sensor plays an important role in our daily lives. From pH level, heavy metal monitoring and evaluating bio-medical ion balance, these applications become more accessible as sensing technologies matures. The ion sensitive FET has compact size, cost-effective and fast response time; however, it is limited by the Nernst limit. The proposal ion detector with coupling structure not only can achieve high sensitivity, its sensing range can also be dynamically adjusted by setting suitable biasing conditions to alleviate such a challenge. Here, we especially focused on comparing the effect of various kinds of sensing film, their corresponding thickness and sensing region size on the sensing characteristics of the new detector. This new detector can deliver an output responsivity as high as 150 mV/pH. Moreover, the preliminary measurement results on sodium ion sensing obtained by calix[4]arene film are demonstrated. With a sensing gate isolated from the transistor channel, the proposal sensor has fully sensing capability to other kinds of ion such as heavy metal ion and so on. It also suggests that the proposed device can be integrated into sensors array for the detection of multiple ions simultaneously. Further optimization of coating material in the sensing membrane is expected to enhanced the performance of this new ion detector.