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HL: Fachverband Halbleiterphysik
HL 36: Focus Session: Integrated Quantum Photonics II
HL 36.3: Vortrag
Dienstag, 17. März 2020, 14:45–15:00, POT 51
Deterministic integration of single quantum dots into on-chip waveguide devices using in-situ electron beam lithography — •Johannes Schall1, Peter Schnauber1, Samir Bounouar1, Theresa Höhne2, Anshuman Singh3, Suk In Park4, Geun-Hwan Ryu4, Tobias Heindel1, Sven Burger2, Jin-Dong Song4, Kartik Srinivasan3, Sven Rodt1, Marcelo Davanco3, and Stephan Reitzenstein1 — 1Institut für Festkörperphysik, TU Berlin, Berlin, Germany — 2Zuse Institut Berlin, FU Berlin, Berlin, Germany — 3NIST, Gaithersburg, United States — 4KIST, Seoul, Korea
The deterministic integration of quantum emitters into on-chip photonic elements is crucial for the implementation of scalable integrated quantum circuits. We report on the single step deterministic integration of QDs into on-chip WGs using in-situ EBL. We realize multimode interference (MMI) splitters acting as 50/50 coupling elements and demonstrate the functionality by µPL spectroscopy and photon crosscorrelation [1]. Furthermore, we integrate InAs QDs as single-photon sources in SiN WGs. Our deterministic fabrication approach guarantees the precise alignment of InAs QDs in the center of a GaAs Tapers, injecting photons in the SiN WGs underneath. In quasi-resonant p-shell excitation, we demonstrate the generation of indistinguishable photons from a single InAs QD in a hybrid quantum photonic device with a post-selected Hong-Ou-Mandel visibility of 0.89 [2].
[1] Schnauber et al., Nano Letters 18 (4), 2336 (2018)
[2] Schnauber et al., Nano Letters 19 (10), 7164 (2019)