Dresden 2020 – scientific programme

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HL: Fachverband Halbleiterphysik

HL 63: Focus: High-resolution Lithography and 3D Patterning (Part II) (joint session KFM/CPP/HL)

HL 63.7: Talk

Thursday, March 19, 2020, 12:00–12:20, TOE 317

Synthetic strategies towards FEBID precursors — •Iwona Szymańska and Katarzyna Madajska — Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland

The choice of the precursor is crucial for the success of focus electron beam induced deposition (FEBID) because its physicochemical features determine the composition of the deposit.[1] The applied compounds should effectively generate volatile metal carriers, which can be transport over a surface substrate. In the next stage adsorbed molecules should clearly decompose upon electron beam irradiation forming nanostructures. Additionally, the FEBID precursors should be air stable, easy handling, low cost, and safe. Research was focused on the coordination compounds of copper(II) and copper(I), silver(I) and rhenium(III) with N- and O-donor ligands, which seems to be promising for a FEBID process. The influence of structural features such as: 1) the kind of the central atom and its oxidation state; 2) the coordination sphere composition, 3) the modifications of the ligand substituents by fluorination or branching, were observed. [2,3]

Acknowledgements: Nicolaus Copernicus University in Toruń (Statute Research no.103) for the financial support.

References [1] I. Utke et al., J. Vac. Sci. Technol. B, 2008, 26, 1197. [2] L. Berger et al., Beilstein J. Nanotechnol., 2018, 9, 842. [3] K. Höflich et al., Beilstein J. Nanotechnol., 2018, 9, 842.