Dresden 2020 – wissenschaftliches Programm

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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 15: Postersession KFM

KFM 15.13: Poster

Donnerstag, 19. März 2020, 16:00–18:30, P2/1OG

Photoluminescence Spectroscopy of Zinc Oxide based Ring Resonators — •Timo Vullhorst, Nils Weber, and Cedrik Meier — Department Physik, Uniersität Paderborn, 33098 Paderborn

Due to its UV emission at around 375 nm, its strong photoluminescence and nonlinear optical properties, the wide-gap semiconductor zinc oxide (ZnO) is a current subject in photonics research. ZnO based ring resonators (RR) are a novel concept that promise to be small scale, tunable devices capable of filtering and emitting light in the UV-VIS range, allowing for the application as optical modulators, mechanical strain sensors and biosensors. Here, we demonstrate numerical results on optimized devices, fabrication via electron beam lithography and subsequent characterization via photoluminescence spectroscopy of ZnO RRs. ZnO RRs on SiO₂ with heights ranging from 300 to 500 nm were successfully realized with outer radii between 2-4 µm and ring widths between 0.1-1.5 µm, together with full disk resonators. The highest quality factors of Q∼3000 were achieved in a 400 nm high ZnO ring resonator with 4 µm outer radius and 1.5 µm ring width. The findings substantiate the viability of ZnO for application in RR devices and form the starting point for further development and implementation of ZnO RRs.